CDA clean dry air Electronics & semiconductor Electronics and semiconductor Air Quality Product Quality
Our total solutions for Clean Dry Air in semiconductor fabs
Electronics are an integral part of our daily lives, influencing both personal and professional activities. They are the driving force behind the modern world, making everything run smoothly and efficiently.
What are semiconductor fabs?
Focus on Clean Dry Air (CDA)
A critical component in semiconductor production is the Clean Dry Air (CDA) installation. This includes the compressor floor and the dryer/filter floor. The process involves a series of steps to ensure optimal air purity, which is essential for the production environment.
The flow for optimal air purity
The journey to achieving certified clean, dry, and oil-free air involves several stages:
- Ambient Air
Initial air purity levels are measured. - Compressed Saturated Air
Air is compressed, increasing the relative humidity and concentration of contaminants in the air - Pre-filtered Saturated Air
Before the air goes to the dryer a first rough filtration is done to avoid those particles getting into the dryer - Pre-cooled Dry Air
The desiccant dryer reduces the humidity in the air down to a Pressure Dew Point (PDP) of –100°C - Filtered Dry Air
After the dryer there is a first stage of after filtration to capture all the dust carry over. Behind that filter we still have an absolute final filtration step to remove the final particles and guarantee an air quality down to 0.01um.
Showcasing critical applications
CDA is essential in various applications within the semiconductor industry, including:
Cooling and drying of tools
Purging
Tools and equipment in photolithography
Our total solutions
Atlas Copco’s complete solutions for CDA save money on energy efficiency and has many opportunities to help the environment by recoverring the energy used. If we take this example for one of our FAB solutions in a modern semiconductor production line, you could list our contributions as following:
Saving up to 143 million kilowatts of energy
Reducing CO2 emissions by 65 million kilograms
Equivalent to growing 1.7 million tree seedlings for 10 years
Saving 43 million Liters of gasoline
Reducing the need to burn 5 million kilograms of coal
Saving 21 million euros in energy costs