Dry vacuum pumps

Dry (Hydrocarbon free in the process) vacuum pumps play an important part in many vacuum applications and environments and Atlas Copco have a variety of solutions to meet your needs. The main advantage of ‘dry’ pumps is that there is no lubrication in the main pumping chamber thus eliminating the contamination of the process.

Reliability you can trust

Tens and thousands of claw pumps continue to work quietly and efficiently in all corners of the world.

Simplicity that saves you maintenance

Simple but robust design helps to keep maintenance costs down.

Connected to empower

Usable for a huge variety of vacuum applications.

Image showing the new DZS VSD⁺ - Dry Claw Vacuum Pump

Dry claw vacuum pumps

The simplicity, robustness, efficiency and contaminant handling capability of the DZS design pumps make them the smart choice for your application. Built to your exact standards and quality, the new dry claw pump provides you with a trouble-free and cost-effective solution.

DZM 1200 VSD - New

Dry multi-claw vacuum pumps

A complete multi-claw vacuum pumping system in a box. A solution perfectly designed to meet your larger process demands.

Mechanical Booster Pumps

Based on the simple Roots principle, our mechanical booster pumps remain the favorite pumps for applications where high pumping speeds are required for pressures in the region of 0.01 to 50 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure differential to atmospheric pressure.

Dry screw vacuum pump DHS 065 VSD

Dry Screw Vacuum Pump

For lower lifecycle costs, higher productivity, less energy consumption, easy maintenance and proven operation we introduce the DHS 065 – 200 VSD⁺ dry screw vacuum pump – Clean. Compact. Clever.

DSS 065 Dry Scroll Vacuum Pump

Dry Scroll Vacuum Pumps

The DSS vacuum pump is ideal for vacuum generation across the rough vacuum pressure range. Moreover, it is a welcome fit to any production floor due to its simple and elegant design.

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