Oil-free air compressors for semiconductor and electronics production
We help you minimize downtime and optimize your production processes by offering certified oil-free solutions, including reciprocating, scroll, tooth, screw and centrifugal compressors to ensure you have the best technology for your applications.
A reliable partner brings peace of mind
Reliability in your compressed air supplier is key. Clean dry air is a critical utility for semiconductor plants and having any interruptions can be disastrous. Our global service network is installed in more than 180 countries, this means that lead times are very short and minimizes any downtime if maintenance is required.
Certified oil-free air
Innovative technologies require more and especially better air quality. Our range of compressors deliver certified oil-free air. Our Z series of compressors were the first air compressors to achieve TÜV certification as “oil-free” (ISO 8573-1 CLASS 0). Additionally, we are the only compressor manufacturer to have received ISO 22000 certifications.
Energy recovery
The production process of semiconductors and electronics is an extremely energy intensive process. Our solutions give huge opportunities to recover this energy. Heat is an inevitable by-product of air compression, with our energy recovery units you can reuse up to 90% of this otherwise lost energy. Reducing the production costs significantly as well as reducing your environmental footprint. Read more on Energy Recovery
Medtronic electronics, Switserland
Watch how we influence the electronics industry with our qualitative, energy-efficient products and reliable service network
Applications of compressed air in semiconductor and electronic plants
Cooling air
Cooling of products in the clean room is the most critical clean air application in electronic plants.
Clean room
The clean room is the central part of the plant. Any dust or other contaminants must be eliminated in addition to controlling the temperature and humidity of the room. Meaning compressed air must be class 0 oil-free air to avoid any contamination.
Patterning
Paterning or photolitography is the process by which a specific pattern is imprinted on the wafer.
Instrumentation & pneumatic tools
Compressed air is used for sorting, packaging, testing, handling, assembling, etching and more instrumentation or pneumatic applications. Using oil-free air ensure your products will not be contaminated during the production process.
Purging
The purging of the vacuum and venturi pumps have to be done with oil-free air to avoid contamination.
Wastewater Treatment
Water used during the manufacturing process of an electronics plant must be treated before it can be returned to nature. More on Wastewater Treatment
Soldering
Soldering electronics with high quality nitrogen, thus nitrogen with a high purity level, has multiple benefits. It delivers improved performance and in addition it also promises environmental benefits.
Compressed air solutions for semiconductor and electronics production
Oil-free air compressors
ZR & ZT (VSD) oil-free rotary tooth and screw compressors
100% oil-free rotary tooth and screw air compressors. State-of-the art range for outstanding performance. Efficient, safe, reliable
ZH and ZH+ centrifugal oil-free air compressors
ZH and ZH+ centrifugal oil-free air compressors share their performance, but have different features. The ZH+ comes as a complete plug and play package to reduce installation costs. Extremely low noise levels
ZE&ZA (VSD) low pressure oil-free screw compressors
ZE&ZA low-pressure oil-free screw technology gives high performance even in heavy duty conditions. For low pressure air systems.
Oil-free air blowers
ZB VSD+ oil-free centrifugal air blowers
Safeguard your production process and maximize your energy efficiency with our proven oil-free ZB direct drive centrifugal air blowers. With Variable Speed Drive.
ZM oil-free multistage centrifugal blowers and exhausters
Adaptable air and gas, pressure and vacuum blowers and exhausters at minimum maintenance requirement.
ZL (VSD) oil-free lobe blowers
The simplicity and proven design of our ZL oil-free lobe blowers make them the perfect match for installations in harsh environments.
Filters and Dryers
Air filters
A wide selection of filtration solutions for compressed air with different filter types and grades. Supported by our expert application knowledge.
Air dryers
Our range of air dryers protect your systems and processes in a reliable, energy-efficient and cost-effective way.
Nitrogen generators
NGP⁺ PSA nitrogen generator
Our premium nitrogen generator with PSA technology. Fully automated on-site nitrogen production at the lowest total cost, due to a supreme energy efficiency. Purities: 95 – 99.999% Flows: 2 – 2870 Nm³/h
NGP PSA nitrogen generator
Our industrial nitrogen generator with PSA technology. Reliable and cost efficient on-site nitrogen production. Purities: 95 – 99.999% Flows: 2 – 2650 Nm³/h